Synthesis of hydrogen permselective SiO sub 2 , TiO sub 2 , Al sub 2 O sub 3 , and B sub 2 O sub 3 membranes from the chloride precursors

@inproceedings{Tsapatsis1991SynthesisOH,
  title={Synthesis of hydrogen permselective SiO sub 2 , TiO sub 2 , Al sub 2 O sub 3 , and B sub 2 O sub 3 membranes from the chloride precursors},
  author={Michael Tsapatsis and Soojin Kim and Seo Woo Nam},
  year={1991}
}
Hydrogen-permselective membranes were synthesized by chemical vapor deposition of SiO{sub 2}, TiO{sub 2}, Al{sub 2}O{sub 3}, and B{sub 2}O{sub 3} layers within the pores of Vycor tubes. The deposition involved reaction of SiCl{sub 4}, etc., with water at 100-800{degrees} C depending on the chloride and the reaction geometry. Permselective SiO{sub 2} layers could be formed in either the one-sided or the two-sided (opposing reactants) geometry, while deposition of TiO{sub 2} and Al{sub 2}O{sub 3… CONTINUE READING