Synthesis of high purity silicon nanoparticles in a low pressure microwave reactor.

  title={Synthesis of high purity silicon nanoparticles in a low pressure microwave reactor.},
  author={J{\"o}rg Knipping and Hartmut Wiggers and Bernd Rellinghaus and Paul Roth and Denan Konjhodzic and Cedrik Meier},
  journal={Journal of nanoscience and nanotechnology},
  volume={4 8},
The formation of pure single crystalline silicon nanoparticles by microwave induced decomposition of silane in a low pressure flow reactor is reported. The morphology and crystal structure of the particles are characterized in situ by particle mass spectrometry (PMS) and ex situ by means of X-ray diffraction, high resolution transmission electron microscopy, electron energy loss spectroscopy, and infrared spectroscopy. The preparation method allows for the adjustment of the mean particle… 

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