• Materials Science, Engineering
  • Published in SPIE Advanced Lithography 2002
  • DOI:10.1117/12.474222

Synthesis and characterization of photodefinable polycarbonates for use as sacrificial materials in the fabrication of microfluidic devices

@inproceedings{White2002SynthesisAC,
  title={Synthesis and characterization of photodefinable polycarbonates for use as sacrificial materials in the fabrication of microfluidic devices},
  author={Celesta E. White and Clifford L. Henderson},
  booktitle={SPIE Advanced Lithography},
  year={2002}
}
A fabrication technique recently developed at Georgia Institute of Technology involving thermally sacrificial polymeric materials allows for fabrication of microfluidic devices with greater degrees of functionality (i.e., fully integrated, complex, multi-level fluidic systems with functional valves, pumping systems, and other micro- electromechanical system [MEMS] components). In this method, thermally sacrificial polymers are coated onto a substrate and patterned into the shape of the desired… CONTINUE READING