Corpus ID: 93007058

Synthesis and Characterization of Carbon nanowalls by ICP-CVD using Aluminium-Acetylacetonate precursor

@inproceedings{Jain2012SynthesisAC,
  title={Synthesis and Characterization of Carbon nanowalls by ICP-CVD using Aluminium-Acetylacetonate precursor},
  author={Himani Gaur Jain},
  year={2012}
}
  • H. Jain
  • Published 10 October 2012
  • Chemistry
A new method of synthesis of carbon nanowalls using acetylacetonate as metal organic precursor is presented. The films were deposited in ICP-CVD generated argon plasma by varying gas flow rate, plasma power, substrate temperature and reactor pressure. The precursor-feeding rate into the plasma chamber was controlled by the argon gas flow. No catalyst or other carbon gas source was added to deposit such structures. The wall size of CNWs was strongly influenced by the aluminium content present… Expand
Synthesis of carbon nanowalls from a single-source metal-organic precursor
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