Switching capacity of MEMS tilting micromirrors

@article{Marom2012SwitchingCO,
  title={Switching capacity of MEMS tilting micromirrors},
  author={D. M. Marom},
  journal={2012 International Conference on Optical MEMS and Nanophotonics},
  year={2012},
  pages={184-185}
}
  • D. M. Marom
  • Published 2012 in
    2012 International Conference on Optical MEMS and…
The theoretical switching capacity of MEMS tilting micromirrors is calculated, based solely on their size and angular tilt range. The metrics developed can be used to compare different mirror designs and their performance potential.