Suspended silicon mid-infrared waveguide devices with subwavelength grating metamaterial cladding.


We present several fundamental photonic building blocks based on suspended silicon waveguides supported by a lateral cladding comprising subwavelength grating metamaterial. We discuss the design, fabrication, and characterization of waveguide bends, multimode interference devices and Mach-Zehnder interferometers for the 3715 - 3800 nm wavelength range… (More)
DOI: 10.1364/OE.24.022908


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