Suspended nanochannel in MEMS plate resonator for mass sensing in liquid

Abstract

A mass sensor innovative concept is presented here, based on a hollow plate MEMS resonator (Fig. 1). This approach consists in flowing a solution through the embedded nanochannel, while the plate resonator is actuated by electrostatic coupling in dry environment. The experimental results have shown a clear relationship between measured shift of the resonant… (More)

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