Survey on Pressure Sensors in the Previous Decades

Abstract

This paper is presented to give an overall view of pressure sensors in the previous two decades. The evolution of sensor technologies, different MEMS pressure sensors, their merits and demerits are discussed. Keywords— Fabry Perot Interferometer (F-P), Pressure Sensors, Electromagnetic Interference (EMI), Low pressure chemical vapour deposition (LPCVD). 

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