Surface-micromachined micro-XYZ stages for free-space micro-optical bench

  title={Surface-micromachined micro-XYZ stages for free-space micro-optical bench},
  author={Lih Y. Lin and Jin Liang Shen and Seungsoo Lee and Ming C. Wu},
  journal={Digest IEEE/Leos 1996 Summer Topical Meeting. Advanced Applications of Lasers in Materials and Processing},
The surface-micromachined free-space micro-optical bench (FS-MOB) has demonstrated its potential for monolithically integrating entire micro-optical systems on a single chip. In this paper, we propose a novel integrated XYZ stage with three degrees of freedom for precise on-chip optical alignment as well as input/output coupling for the FS-MOB.