Surface micromachined RF MEMS SP9T switch for 60 GHz ISM band antenna sectoring applications

This work presents a radio frequency microelectromechanical system (RF MEMS) based single-pole-nine-throw (SP9T) switch integrated with an antenna at 60 GHz. The device is fabricated on 635 µm alumina substrate using surface micromachining process. SP9T switch features a simulated return loss of > 14 dB, isolation of > 16 dB and insertion loss of ≤ 0.41 dB… (More)