Surface micromachined Fabry-Perot tunable filter

We report the fabrication of a wavelength tunable optical filter using surface micromachining technology. The center wavelength is 1.517 /spl mu/m and the transmission bandwidth is 5 nm. The device with a 50-/spl mu/m diameter aperture has an optical loss of about 5 dB. A continuous wavelength tuning of 60 nm has been demonstrated. This device may find… CONTINUE READING