Surface control of interstitial behavior for improved ultrashallow junction formation

@article{Seebauer2004SurfaceCO,
  title={Surface control of interstitial behavior for improved ultrashallow junction formation},
  author={E. Seebauer},
  journal={The Fourth International Workshop on Junction Technology, 2004. IWJT '04.},
  year={2004},
  pages={81-86}
}
  • E. Seebauer
  • Published 2004 in
    The Fourth International Workshop on Junction…
There is increasing evidence that surface proximity effects must be incorporated into models for transient enhanced diffusion (TED). The present work examines the previously unrecognized influence that near-surface band bending can have on dopant profiles. Experiments employ the optical technique of photoreflectance to show that band bending exists at the… CONTINUE READING