Surface acoustic wave velocity in single-crystal AlN substrates

  title={Surface acoustic wave velocity in single-crystal AlN substrates},
  author={Gang Bu and Daumantas {\vC}iplys and M. S. Shur and L. J. Schowalter and S. Schujman and Remis Gaska},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
The surface acoustic wave velocity has been measured on a-plane (c-propagation) and c-plane oriented bulk aluminum nitride (AlN) single crystals using the S/sub 11/-parameter method in the frequency range 160-360 MHz. The SAW velocity is 5760 m/s for both orientations. From comparison of this value with the simulations using various elastic constants of AlN available in literature, we estimated the elastic constant C/sub 44/ to be 122 /spl plusmn/ 1 GPa. 
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Electromechanical coupling coefficient for surface acoustic waves in single crystal, bulk aluminum nitride

  • G. Bu, D. Čiplys, M. Shur, L. J. Schowalter, S. Schujman, R. Gaska
  • Appl. Phys. Lett., vol. 84, pp. 4611–4613, June…
  • 2004
2 Excerpts

Temperature coefficient of SAW frequency in single crystal bulk AlN

  • G. Bu, D. Čiplys, M. Shur, L. J. Schowalter, S. Schujman, R. Gaska
  • Electron. Lett., vol. 398, pp. 755–757, May 2003.
  • 2003
1 Excerpt

Evaluation of physical parameters for the group III nitrates: BN, AlN, GaN, and InN

  • S. Y. Davydov
  • Semiconductors, vol. 36, pp. 41–44, Jan. 2002.
  • 2002
1 Excerpt

First-principles study on electronic and elastic properties of BN, AlN, and GaN

  • K. Shimada, T. Sota, K. Suzuki
  • J. Appl. Phys., vol. 84, pp. 4951–4958, Nov. 1998…
  • 1998
3 Excerpts

Sound velocity of AlxGa1-xN thin films obtained by surface acoustic-wave measurements

  • C. Deger, E. Born, +5 authors G. Fischerauer
  • Appl. Phys. Lett., vol. 72, pp. 2400–2402, May…
  • 1998
3 Excerpts

X-ray and single crystal values of the elastic constants and determination of machining residual stresses in AlN

  • A. Kampfe, B. Eigenmann, O. Vohringer, D. Lohe
  • High Temperature Material Processes, vol. 2, pp…
  • 1998
2 Excerpts

Elastic properties of zinc-blende and wurtzite AlN, GaN, and InN

  • A. F. Wright
  • J. Appl. Phys., vol. 82, pp. 2833–2839, Sep. 1997…
  • 1997
1 Excerpt

Fabrication of native single-crystal AlN substrate

  • L. J. Schowalter, G. A. Slack, +5 authors K. R. Evans
  • Phys. Stat. Sol. (c), vol. 0, pp. 1997–2000, 2003…
  • 1997
2 Excerpts

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