Surface acoustic wave velocity in single-crystal AlN substrates

@article{Bu2006SurfaceAW,
  title={Surface acoustic wave velocity in single-crystal AlN substrates},
  author={Gang Bu and Daumantas {\vC}iplys and M. S. Shur and L. J. Schowalter and S. Schujman and Remis Gaska},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
  year={2006},
  volume={53},
  pages={251-254}
}
The surface acoustic wave velocity has been measured on a-plane (c-propagation) and c-plane oriented bulk aluminum nitride (AlN) single crystals using the S/sub 11/-parameter method in the frequency range 160-360 MHz. The SAW velocity is 5760 m/s for both orientations. From comparison of this value with the simulations using various elastic constants of AlN available in literature, we estimated the elastic constant C/sub 44/ to be 122 /spl plusmn/ 1 GPa. 
Highly Cited
This paper has 36 citations. REVIEW CITATIONS

From This Paper

Figures, tables, and topics from this paper.
19 Citations
18 References
Similar Papers

Citations

Publications citing this paper.
Showing 1-10 of 19 extracted citations

References

Publications referenced by this paper.
Showing 1-10 of 18 references

Electromechanical coupling coefficient for surface acoustic waves in single crystal, bulk aluminum nitride

  • G. Bu, D. Čiplys, M. Shur, L. J. Schowalter, S. Schujman, R. Gaska
  • Appl. Phys. Lett., vol. 84, pp. 4611–4613, June…
  • 2004
2 Excerpts

Temperature coefficient of SAW frequency in single crystal bulk AlN

  • G. Bu, D. Čiplys, M. Shur, L. J. Schowalter, S. Schujman, R. Gaska
  • Electron. Lett., vol. 398, pp. 755–757, May 2003.
  • 2003
1 Excerpt

Evaluation of physical parameters for the group III nitrates: BN, AlN, GaN, and InN

  • S. Y. Davydov
  • Semiconductors, vol. 36, pp. 41–44, Jan. 2002.
  • 2002
1 Excerpt

First-principles study on electronic and elastic properties of BN, AlN, and GaN

  • K. Shimada, T. Sota, K. Suzuki
  • J. Appl. Phys., vol. 84, pp. 4951–4958, Nov. 1998…
  • 1998
3 Excerpts

Sound velocity of AlxGa1-xN thin films obtained by surface acoustic-wave measurements

  • C. Deger, E. Born, +5 authors G. Fischerauer
  • Appl. Phys. Lett., vol. 72, pp. 2400–2402, May…
  • 1998
3 Excerpts

X-ray and single crystal values of the elastic constants and determination of machining residual stresses in AlN

  • A. Kampfe, B. Eigenmann, O. Vohringer, D. Lohe
  • High Temperature Material Processes, vol. 2, pp…
  • 1998
2 Excerpts

Elastic properties of zinc-blende and wurtzite AlN, GaN, and InN

  • A. F. Wright
  • J. Appl. Phys., vol. 82, pp. 2833–2839, Sep. 1997…
  • 1997
1 Excerpt

Fabrication of native single-crystal AlN substrate

  • L. J. Schowalter, G. A. Slack, +5 authors K. R. Evans
  • Phys. Stat. Sol. (c), vol. 0, pp. 1997–2000, 2003…
  • 1997
2 Excerpts

Similar Papers

Loading similar papers…