Surface acoustic wave modes in two-dimensional shallow void inclusion phononic crystals on GaAs

  title={Surface acoustic wave modes in two-dimensional shallow void inclusion phononic crystals on GaAs},
  author={Edward Muzar and James A. H. Stotz},
  journal={Journal of Applied Physics},
Surface acoustic waves in two-dimensional phononic crystals consisting of a square array of shallow, two to three micron deep cylindrical void inclusions are studied computationally via the finite element method. For the [110] propagation direction on a (001) GaAs half-space, the conventional Rayleigh wave modes, the layered substrate-associated Sezawa and Lamb modes, the high frequency longitudinal surface waves and bulk waves exhibit hybridization and modal interaction. The longitudinal… 

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