Surface Micromachined Polyimide Scanning Thermocouple Probes

  title={Surface Micromachined Polyimide Scanning Thermocouple Probes},
  author={Mo-Huang Li and Jiuum J. Wu and Yogesh B. Gianchandani},
This paper describes micromachined scanning thermocouple probes that exploit the low thermal conductivity and the high mechanical flexibility of polyimide as a structural material. They are surface micromachined using a low-temperature six-mask process suitable for appending to a CMOS fabrication sequence. The probes are 200–1000m long, 40–120m wide, and of varying thickness. They are assembled by a flip-over approach that eliminates the need for dissolving the substrate wafer or removing the… CONTINUE READING


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