Surface Acoustic Wave sensor based on AlN/Sapphire structure for high temperature and high frequency applications

  title={Surface Acoustic Wave sensor based on AlN/Sapphire structure for high temperature and high frequency applications},
  author={Eloi Blampain and Omar Elmazria and Thierry Aubert and Badreddine Mohamed Assouar and Ouarda Legrani},
  journal={2011 IEEE SENSORS Proceedings},
In this work, the performance of AlN/Sapphire structure in high frequencies is investigated. Several SAW devices were performed with various designs (gap, wavelength, metallization ratio, …) to study simultaneously different parameters (acoustic velocity, electromechanical coupling (K2), acoustic propagation loss (α), TCF) versus frequency and temperature. Experimental results showed that as expected, a increases with temperature while K2 is enhanced at high temperatures. Due to the… CONTINUE READING
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Publications referenced by this paper.
Showing 1-10 of 10 references

Theoretical and experimental investigation of gigahertz-band, temperature-compensated electromechanical coupling configurations based on AlN films

C. Caliendo
Appl. Phys. Lett., vol. 92, pp. 033505, 2008. • 2008
View 2 Excerpts

ZnO/A1N/diamond layered structure for SAW devices combining high velocity and high electromechanical coupling coefficient

M El Hakiki, O Elmazria, MB Assouar
Diam. & Relat. Mater • 2005
View 1 Excerpt

Effect of diamond nucleation process on propagation losses of AlN/diamond SAW filter

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control • 2004

Determination of transducer equivalent circuit and the coupling coefficient in SAW structures

F. Jungnickel, H.-J. Fr ̈ohlich
Acoust. Ultrason., pp. 89–92, 1998. • 1998
View 1 Excerpt

Obtaining the fundamental and harmonic radiation conductances of a reflective SAW interdigital Transducer

C. K. Campbell
IEEE Ultrasonics Symp., • 1998
View 1 Excerpt

A simple equivalent circuit parameter extraction technique

J. H. Hines, D. C. Malocha
Proc. IEEE Ultrason. Symp., 1993, pp. 173–177. • 1993
View 1 Excerpt

Surface acoustic wave devices

IEEE Communications Magazine • 1979
View 1 Excerpt

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