Surface Acoustic Wave sensor based on AlN/Sapphire structure for high temperature and high frequency applications

@article{Blampain2011SurfaceAW,
  title={Surface Acoustic Wave sensor based on AlN/Sapphire structure for high temperature and high frequency applications},
  author={Eloi Blampain and Omar Elmazria and Thierry Aubert and Badreddine Mohamed Assouar and Ouarda Legrani},
  journal={2011 IEEE SENSORS Proceedings},
  year={2011},
  pages={610-613}
}
In this work, the performance of AlN/Sapphire structure in high frequencies is investigated. Several SAW devices were performed with various designs (gap, wavelength, metallization ratio, …) to study simultaneously different parameters (acoustic velocity, electromechanical coupling (K2), acoustic propagation loss (α), TCF) versus frequency and temperature. Experimental results showed that as expected, a increases with temperature while K2 is enhanced at high temperatures. Due to the… CONTINUE READING
Highly Cited
This paper has 93 citations. REVIEW CITATIONS

From This Paper

Figures, tables, and topics from this paper.

Citations

Publications citing this paper.
Showing 1-10 of 36 extracted citations

Langasite surface acoustic wave sensors: Fabrication and testing

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control • 2012
View 2 Excerpts
Highly Influenced

AlN/6H-SiC SAW resonator for high temperature wireless SAW sensor

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) • 2017
View 1 Excerpt

Feasibility Study on Wireless Passive SAW Sensor in IoT Enabled Water Distribution System

2017 IEEE International Conference on Internet of Things (iThings) and IEEE Green Computing and Communications (GreenCom) and IEEE Cyber, Physical and Social Computing (CPSCom) and IEEE Smart Data (SmartData) • 2017
View 1 Excerpt

Sensitivity analysis of langasite surface acoustic wave pressure sensors

2017 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) • 2017
View 1 Excerpt

High-Temperature Piezoelectric Crystals for Acoustic Wave Sensor Applications

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control • 2016

94 Citations

01020'11'13'15'17'19
Citations per Year
Semantic Scholar estimates that this publication has 94 citations based on the available data.

See our FAQ for additional information.

References

Publications referenced by this paper.
Showing 1-10 of 10 references

Theoretical and experimental investigation of gigahertz-band, temperature-compensated electromechanical coupling configurations based on AlN films

C. Caliendo
Appl. Phys. Lett., vol. 92, pp. 033505, 2008. • 2008
View 2 Excerpts

ZnO/A1N/diamond layered structure for SAW devices combining high velocity and high electromechanical coupling coefficient

M El Hakiki, O Elmazria, MB Assouar
Diam. & Relat. Mater • 2005
View 1 Excerpt

Effect of diamond nucleation process on propagation losses of AlN/diamond SAW filter

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control • 2004

Determination of transducer equivalent circuit and the coupling coefficient in SAW structures

F. Jungnickel, H.-J. Fr ̈ohlich
Acoust. Ultrason., pp. 89–92, 1998. • 1998
View 1 Excerpt

Obtaining the fundamental and harmonic radiation conductances of a reflective SAW interdigital Transducer

C. K. Campbell
IEEE Ultrasonics Symp., • 1998
View 1 Excerpt

A simple equivalent circuit parameter extraction technique

J. H. Hines, D. C. Malocha
Proc. IEEE Ultrason. Symp., 1993, pp. 173–177. • 1993
View 1 Excerpt

Surface acoustic wave devices

IEEE Communications Magazine • 1979
View 1 Excerpt

Similar Papers

Loading similar papers…