Suppression in negative bias illumination stress instability of zinc tin oxide transistor by insertion of thermal TiOx films

@article{Lee2013SuppressionIN,
  title={Suppression in negative bias illumination stress instability of zinc tin oxide transistor by insertion of thermal TiOx films},
  author={Chang-kyu Lee and Hong Yoon Jung and Se Yeob Park and Byeong Geun Son and Chul-kyu Lee and Hyo Jin Kim and Rino Choi and Dae-hwan Kim and Jong-Uk Bae and Woo-Sup Shin and Jae Kyeong Jeong},
  journal={IEEE Electron Device Letters},
  year={2013},
  volume={34},
  pages={253-255}
}
This letter examined the insertion effect of thermal TiO<sub>2</sub> films on the device performance and photo-bias instability of zinc tin oxide (ZTO) thin-film transistors (TFTs). A 5.0-nm-thick TiO<i>x</i> device inserted at the ZTO/silicon nitride (SiN<i>x</i>) interface exhibited slightly lower mobility (9.4 cm<sup>2</sup>/V·s ) compared with that (14.1 cm<sup>2</sup>/V·s ) of the reference device with a ZTO/SiN<i>x</i> stack. On the other hand, the negative gate-bias-illumination-stress… CONTINUE READING
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References

Publications referenced by this paper.
Showing 1-10 of 15 references

The status and perspectives of metal oxide thin-film transistors for active matrix displays

  • J. K. Jeong
  • Semicond. Sci. Technol., vol. 26, no. 3, p…
  • 2011
Highly Influential
3 Excerpts

Study of post annealing influence on structural, chemical and electrical properties of ZTO thin film

  • V. K. Jain, P. Kumar, M. Kumar, P. Jain, D. Bhandari, Y. K. Vijay
  • J. Alloy Comp., vol. 509, no. 8, pp. 3541– 3546…
  • 2011
1 Excerpt

Comparative study of electrical instabilities in top-gate InGaZnO thin film transistors with Al2O3 and Al2O3/SiNx gate dielectric

  • J.-M. Lee, I.-T. Cho, J.-H. Lee, W.-S. Cheong, C.-S. Hwang, H.-I. Kwon
  • Appl. Phys. Lett., vol. 94, no. 22, pp. 222112-1…
  • 2009
1 Excerpt

Origin of subthreshold swing improvement in amorphous indium gallium zinc oxide transistors

  • J. H. Jeong, H. W. Yang, +5 authors C. S. Hwang
  • Electrochem. Solid- State Lett., vol. 11, no. 6…
  • 2008
1 Excerpt

Highperformance, spin-coated zinc tin oxide thin-film transistors

  • Y.-J. Chang, D.-H. Lee, G. S. Herman, C.-H. Chang
  • Electrochem. Solid-State Lett., vol. 10, no. 5…
  • 2007
1 Excerpt

Hydrophilic characteristics of RF-sputtered amorphous TiO2 film

  • M. Nakamura, T. Aoki, Y. Hatanaka
  • Vacuum, vol. 59, no. 2/3, pp. 506– 513, Nov. 2000…
  • 2000
1 Excerpt

Successful implementation methods of atmospheric CVD on a glass manufacturing line

  • R. J. McCurdy
  • Thin Solid Films, vol. 351, no. 1/2, pp. 66– 72…
  • 1999
1 Excerpt

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