Superconducting phase transitions in disordered NbTiN films

  title={Superconducting phase transitions in disordered NbTiN films},
  author={M. V. Burdastyh and Svetlana V. Postolova and Thomas Proslier and Sergei S. Ustavshikov and Alexander V. Antonov and Valerii M. Vinokur and Alexey Yu. Mironov},
  journal={Scientific Reports},
Suppression of superconductivity in disordered systems is a fundamental problem of condensed matter physics. Here we investigate superconducting niobium-titanium-nitride (Nb 1− x Ti x N) thin films grown by the atomic layer deposition (ALD) with slightly different growth process parameters. We observe a smooth crossover from the disorder-driven superconductor-normal metal transition (SMT) to the superconductor-insulator transition (SIT) via the intermediate Bose metal state detected by the low… Expand
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