Superconducting Y–Ba–Cu–O Oxide Films by OMCVD

  title={Superconducting Y–Ba–Cu–O Oxide Films by OMCVD},
  author={Tomohiro Nakamori and Hitoshi Abe and Takashi Kanamori and Susumu Shibata},
Formation of Y-Ba-Cu-O films have been attempted by the organometallic chemical vapor deposition (OMCVD) method using Y(thd)3, Ba(thd)2, and Cu(thd)2 (thd=2,2,6,6,-tetramethyl-3,5-heptanedione), which are organic metal chelates, as gas sources. The results of electron probe microanalysis (EPMA) show that the film formed has a composition similar to that of YBa2Cu3Ox ceramics. The film has a high resistivity in the as-deposited state. If the film is conditioned at 950°C for 30 minutes, the… CONTINUE READING