Superconducting Properties of YBa2Cu3O7-x Films Prepared by ECR Plasma-Assisted Sputtering

@article{Fujii1992SuperconductingPO,
  title={Superconducting Properties of YBa2Cu3O7-x Films Prepared by ECR Plasma-Assisted Sputtering},
  author={Tatsuo Fujii and K. Furusho and Tsuyoshi Koyanagi and K. Morofuji and Kakuei Matsubara and T. Anno and Keiko Fujii},
  journal={IEEE Translation Journal on Magnetics in Japan},
  year={1992},
  volume={7},
  pages={562-566}
}
Using ECR plasma-assisted ing,¬ YBa<inf>2</inf>Cu<inf>3</inf>O<inf>7-x</inf> films with c-axis orientation were grown epitaxially on (100) SrTiO<inf>3</inf> substrates. YBa<inf>2</inf>Cu<inf>3</inf>O<inf>7-x</inf> films prepared by ECR plasma-assisted sputtering had a smaller lattice constant c and a higher Tc than films prepared by magnetron sputtering alone. Optical emisssion spectroscopy measurements were performed during deposition to investigate the relationship between the superconducting… CONTINUE READING