Subwavelength Optical Elements and Nanoimprint Technology for Optical MEMS/NMES

  • S. Y. Chou
  • Published 2006 in
    IEEE/LEOS International Conference on Optical…
This paper presents examples in SOEs and NIL. It shows how to change the optical function of SOEs by changing the geometries of the sub-wavelength feature, while keeping the materials the same (e.g. Si): changing from waveplates to filters (e.g. photonic crystals), antireflection surfaces, polarizers, beam splitters, and to lenses. It also shows that each… (More)