Substrates for zero temperature coefficient Love wave sensors.

Abstract

Microacoustic Love wave delay lines show high sensitivity to perturbations such as mass depositions on the wave-guide surface. Furthermore, because of their shear polarization, Love waves are ideally suited for liquid sensing applications. Using a Love wave delay line as feedback element in an oscillator allows the realization of viscosity sensors, and, using a chemical interface, chemical sensors, where the output signal is the oscillation frequency. To achieve a high effective sensitivity, the cross-sensitivity to temperature has to be kept low. We outline the proper choice of a material and especially focus on the influence of crystal cut and the major device design parameters (mass sensitivity and coupling coefficient) on the temperature coefficient of the sensor.

DOI: 10.1109/58.842059

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Cite this paper

@article{Jakoby2000SubstratesFZ, title={Substrates for zero temperature coefficient Love wave sensors.}, author={Bernhard Jakoby and Michiel J. Vellekoop}, journal={IEEE transactions on ultrasonics, ferroelectrics, and frequency control}, year={2000}, volume={47 3}, pages={701-5} }