Substrate e ff ects in magnetron sputtering of CoCrTa / Cr films on flexible substrates

Abstract

The aim of this work is to investigate the influence of different substrate effects, when magnetron sputtering is used to sputter CoCrTa/Cr layers on different plastic (PET: polyethylene terephthalate) substrates, on kapton and on glass. Four substrate effects were investigated: the kind and thickness of the plastic, the shape of the substrate holder, the… (More)

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