Subnanometer localization accuracy in widefield optical microscopy

  title={Subnanometer localization accuracy in widefield optical microscopy},
  author={Craig R. Copeland and Jon Geist and Craig D. McGray and Vladimir A. Aksyuk and J. Alexander Liddle and B. Robert Ilic and Samuel M. Stavis},
  journal={Light, Science \& Applications},
The common assumption that precision is the limit of accuracy in localization microscopy and the typical absence of comprehensive calibration of optical microscopes lead to a widespread issue—overconfidence in measurement results with nanoscale statistical uncertainties that can be invalid due to microscale systematic errors. In this article, we report a comprehensive solution to this underappreciated problem. We develop arrays of subresolution apertures into the first reference materials that… 
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