Subnanometer Translation of Microelectromechanical Systems Measured by Discrete Fourier Analysis of CCD Images

@article{Yamahata2010SubnanometerTO,
  title={Subnanometer Translation of Microelectromechanical Systems Measured by Discrete Fourier Analysis of CCD Images},
  author={Christophe Yamahata and Edin Sarajlic and G. Krijnen and M. A. M. Gijs},
  journal={Journal of Microelectromechanical Systems},
  year={2010},
  volume={19},
  pages={1273-1275}
}
In-plane linear displacements of microelectromechanical systems are measured with subnanometer accuracy by observing the periodic micropatterns with a charge-coupled device camera attached to an optical microscope. The translation of the microstructure is retrieved from the video by phase-shift computation using discrete Fourier transform analysis. This approach is validated through measurements on silicon devices featuring steep-sided periodic microstructures. The results are consistent with… CONTINUE READING
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