Submicron integrated circuits

@inproceedings{Watts1989SubmicronIC,
  title={Submicron integrated circuits},
  author={Roderick Kent Watts},
  year={1989}
}
The submicrometer silicon MODFET scaling the silicon bipolar transistor submicron gaas, AlGaAs/GaAs, and AlGaAs/InGaAs transistors ultrahigh-speed HEMT LSI circuits resonant tunneling devices and their applications electrical modeling interconnections impact of VLSI technology scaling on computer architectures lateral surfacr superlattices two-dimensional automata in VLSI VLSI electronic neural networks rapid thermal processing of silicon lithography. 

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