Sub-micro-gravity capacitive SOI microaccelerometers

@article{Amini2005SubmicrogravityCS,
  title={Sub-micro-gravity capacitive SOI microaccelerometers},
  author={B. V. Amini and Reza Abdolvand and Farrokh Ayazi},
  journal={The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.},
  year={2005},
  volume={1},
  pages={515-518 Vol. 1}
}
The implementation and preliminary characterization of a new in-plane capacitive microaccelerometer with sub-micro-gravity resolution (<200ng//spl radic/Hz) and very high sensitivity (>15pF/g) is presented. The accelerometers are fabricated in thick (>100 /spl mu/m) silicon-on-insulator (SOI) substrates using a 2-mask fully-dry-release process that provides large seismic mass (>10 mg), reduced capacitive gaps, and reduced in-plane stiffness. The fabricated devices were interfaced to a high… CONTINUE READING
Highly Cited
This paper has 21 citations. REVIEW CITATIONS
17 Citations
9 References
Similar Papers

Citations

Publications citing this paper.
Showing 1-10 of 17 extracted citations

References

Publications referenced by this paper.
Showing 1-9 of 9 references

, and F . Ayazi " A high resolution , stictionless , CMOS - compatible SOI accelerometer with a low - noise , low - power , 0 . 25 μ m CMOS interface

  • S. Pourkamali Vakili Amini
  • 2004

, and F . Ayazi , " A 2 . 5 V 14 - bit Sigma - Delta CMOS - SO 1 capacitive accelerometer

  • S. Pourkamali Vakili Amini, M. Zaman, F. Ayazi, Vakili Amini

Similar Papers

Loading similar papers…