Sub 50-nm FinFET: PMOS

  title={Sub 50-nm FinFET: PMOS},
  author={Xuejue Huang and Wen-Chin Lee and Charles Kuo and Digh Hisamoto and Leland Chang and Jakub Kedzierski and Erik H. Anderson and Hideki Takeuchi and Yang-Kyu Choi and K. Asano and Vivek Subramanian and Tsu-Jae King and Jeffrey Bokor and Chenming Hu},
  journal={International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318)},
High performance PMOSFETs with gate length as short as 18-nm are reported. A self-aligned double-gate MOSFET structure (FinFET) is used to suppress the short channel effect. A 45 nm gate-length PMOS FinEET has an I/sub dsat/ of 410 /spl mu/A//spl mu/m (or 820 /spl mu/A//spl mu/m depending on the definition of the width of a double-gate device) at Vd=Vg=1.2 V and Tox=2.5 nm. The quasi-planar nature of this variant of the double-gate MOSFETs makes device fabrication relatively easy using the… Expand

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