Study on the RF Sputtered hydrogenated amorphous silicon-germanium thin films

Sorry, there's nothing here.

Cite this paper

@article{Sernyi2005StudyOT, title={Study on the RF Sputtered hydrogenated amorphous silicon-germanium thin films}, author={M. Ser{\'e}nyi and J. Betko and {\'A}kos Nemcsics and N. Q. Khanh and D. K. Basa and M. Morvic}, journal={Microelectronics Reliability}, year={2005}, volume={45}, pages={1252-1256} }