Study on shop floor control system in semiconductor fabrication by self-organizing map-based intelligent multi-controller

Abstract

0360-8352/$ see front matter 2012 Elsevier Ltd. A doi:10.1016/j.cie.2012.01.004 ⇑ Corresponding author. Address: Department o Huafan University, No. 1, Huafan Rd., Shihding Dist., ROC. Tel.: +886 2 26632102x4375; fax: +886 2 26632 E-mail addresses: yrshiue@gmail.com, yrshiue@cc. To confirm semiconductor wafer fabrication (FAB) operating characteristics, the… (More)
DOI: 10.1016/j.cie.2012.01.004

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@article{Shiue2012StudyOS, title={Study on shop floor control system in semiconductor fabrication by self-organizing map-based intelligent multi-controller}, author={Yeou-Ren Shiue and Ruey-Shiang Guh and Tsung-Yuan Tseng}, journal={Computers & Industrial Engineering}, year={2012}, volume={62}, pages={1119-1129} }