Study on self-sensing electrostatic suspension using a variable capacitor

@article{Kato2010StudyOS,
  title={Study on self-sensing electrostatic suspension using a variable capacitor},
  author={Takashi Kato and Yuji Ishino and Masaya Takasaki and Takeshi Mizuno},
  journal={2010 11th IEEE International Workshop on Advanced Motion Control (AMC)},
  year={2010},
  pages={426-429}
}
An electrostatic actuator control system using a variable capacitor has been proposed for achieving levitation without high voltage amplifiers. This paper presented a self-sensing method in this system. The principles of voltage control and position estimation of the floator are described. The static position estimation is reported. The position of the floator was estimated from a capacitance of the variable capacitor and voltage across an electrostatic actuator. A circuit for measurement was… CONTINUE READING