Study on atmospheric pressure plasma processing of fused silica

@inproceedings{DF2013StudyOA,
  title={Study on atmospheric pressure plasma processing of fused silica},
  author={Wang D.-F.},
  year={2013}
}
  • Wang D.-F.
In order to get ultra-smooth surface without subsurface damage efficiently for fused silica, the atmospheric pressure plasma processing (APPP) is developed. It is based on chemical reaction between active radicals excited by plasma and workpiece surface atoms, so the subsurface damage caused by contact stress can be avoided and atomic-level precision machining can be achieved. In this paper, the influence on material removal function by the key factors of APPP including the flow rate of… CONTINUE READING