Study of ion activation in the in situ low-temperature laser deposition of superconducting YBa2Cu3O7-δ films

@inproceedings{Mukherjee1993StudyOI,
  title={Study of ion activation in the in situ low-temperature laser deposition of superconducting YBa2Cu3O7-δ films},
  author={Pritish Mukherjee and Palanikumaran Sakthivel and K. Ahmed and Sarath Witanachchi},
  year={1993}
}
The presence of a pulsed discharge during the reactive deposition of high Tc thin films allows the lowering of substrate temperatures to ∼475 °C for in situ superconducting film deposition. We present the first ion probe analysis to study the role of this pulsed discharge on the excimer laser ablated YBa2Cu3O7−δ plume. The ionic enhancement in the laser‐ablated plume, during reactive deposition in the presence of a positively biased ring electrode, is studied both in terms of its extent and… CONTINUE READING