Study of High-k/Metal-Gate Work-Function Variation Using Rayleigh Distribution


By using a Monte Carlo simulation for the stochastic distribution of grain sizes, the work-function variation (WFV) in high-k/metal-gate (HK/MG) is quantitatively and simply estimated with improved physical validity, with a Rayleigh distribution. Based on the Rayleigh distribution for the grain sizes, the WFV calculation for a TiN gate-stack is validated by… (More)


6 Figures and Tables