Study of Different Parametric Variations of MOSFET Pressure Sensor
@article{Bhargava2018StudyOD,
title={Study of Different Parametric Variations of MOSFET Pressure Sensor},
author={Shruti Bhargava and S. Subbarao},
journal={Indonesian Journal of Electrical Engineering and Computer Science},
year={2018},
volume={10},
pages={19-26}
}There is a growing demand of miniaturization of the electronics world. A brief discussion for simulating and fabrication of the MOSFET based pressure sensor in nanoscale is being reviewed in this paper. Aim of this paper is to collect all the scaling challenges and their solutions together to make understanding the facts of the MOSFET based sensor. As the MOSFET move from micro scale to nanoscale the functioning changes dramatically. The Silicon oxide material fails when scale down to nano… CONTINUE READING
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References
SHOWING 1-10 OF 22 REFERENCES
A novel MEMS pressure sensor with MOSFET on chip
- Engineering
- 2008 IEEE Sensors
- 2008
- 29
- Highly Influential
Novel MOSFET Based Pressure Sensor That Uses Combined Channel Piezoresistance and Gate Capacitance Effects
- Engineering
- 2015
- 3
Design and optimization of a CMOS-MEMS integrated current mirror sensing based MOSFET embedded pressure sensor
- Engineering, Computer Science
- 2013 IEEE International Conference on Control Applications (CCA)
- 2013
- 12
- Highly Influential
CMOS-MEMS integrated MOSFET embedded bridge structure based pressure sensor
- Engineering
- 2013 Annual IEEE India Conference (INDICON)
- 2013
- 4
Fabrication and Characteristics of an nc-Si/c-Si Heterojunction MOSFETs Pressure Sensor
- Materials Science, Computer Science
- Sensors
- 2012
- 19
- PDF