Studies of Composition of Surfaces and Interfaces with the Use of Auger Electron Spectroscopy

Abstract

Processes leading to the Auger electron emission from the sample bombarded with a primary electron beam are discussed. It is shown that every element has its characteristic spectrum of Auger lines, and that owing to a small inelastic mean free path of Auger electrons, information obtained from Auger electron spectroscopy concerns the composition of surface… (More)

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Cite this paper

@inproceedings{R2013StudiesOC, title={Studies of Composition of Surfaces and Interfaces with the Use of Auger Electron Spectroscopy}, author={S. ΜR{\'O}Ζ and Swetfłana Mr{\'o}z}, year={2013} }