Studies of BaO-Nd2O3-TiO3 thin films by RF Sputter and its TMLs


As a high permittivity and low loss ceramic, BaO-Nd<sub>2</sub>O<sub>3</sub>-TiO<sub>3</sub> (BNT) is widely used in millimeter wave dielectric resonator. Perfect BNT thin films are obtained by through high density plasma RF sputter, and compared dielectric properties with bulk. The results show that underlay temperature has mainly effect on thin films. The… (More)


1 Figure or Table