Structured synthesis of MEMS using evolutionary approaches

  title={Structured synthesis of MEMS using evolutionary approaches},
  author={Zhun Fan and Jiachuan Wang and Sofiane Achiche and Erik D. Goodman and Ronald C. Rosenberg},
  journal={Appl. Soft Comput.},
In this paper, we discuss the hierarchy that is involved in a typical MEMS design and how evolutionary approaches can be used to automate the hierarchical synthesis process for MEMS. The paper first introduces the flow of a structured MEMS design process and emphasizes that systemlevel lumped-parameter model synthesis is the first step of the MEMS synthesis process. At the system level, an approach combining bond graphs and genetic programming can lead to satisfactory design candidates as… CONTINUE READING
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