The opinions, findings, conclusions and recommendations expressed in this Report are those of the authors and do not necessarily reflect the view of the National Science Foundation. The U.S. government has certain rights in this material. However, the material is not copyrighted and any part of this report may be reproduced, in any form and by any means… (More)


16 Figures and Tables

Cite this paper

@inproceedings{Antonsson1996StructuredDM, title={Structured Design Methods for MEMS}, author={Erik K. Antonsson and Narayan R. Aluru and G. K. Ananthasuresh and A. C. Z. Khang}, year={1996} }