Structure modification of M-AFM probe for the measurement of local conductivity

@article{Fujimoto2010StructureMO,
  title={Structure modification of M-AFM probe for the measurement of local conductivity},
  author={A. Fujimoto and L. Zhang and A. Hosoi and Y. Ju},
  journal={Microsystem Technologies},
  year={2010},
  volume={17},
  pages={715-720}
}
In order to realize the evaluation of electrical properties of materials in nanometer scale, a method to measure the local conductivity of materials was demonstrated. A microwave atomic force microscope (M-AFM) probe which can propagate and emit microwave signals was fabricated. An open structure of a waveguide at the tip of the probe was introduced by focused ion beam fabrication. The M-AFM combined a network analyzer and an AFM was used to measure a sample. The amplitude and phase of the… Expand

References

SHOWING 1-10 OF 14 REFERENCES
Properties of M-AFM probe affected by nanostructural metal coatings
A microwave probe nanostructure for atomic force microscopy
Development of a nanostructural microwave probe based on GaAs
...
1
2
...