Structure and Morphology of Fluorocarbon Films Grown by Hot Filament Chemical Vapor Deposition

  title={Structure and Morphology of Fluorocarbon Films Grown by Hot Filament Chemical Vapor Deposition},
  author={Kenneth K. S. Lau and Jeffrey A. Caulfield and Karen K. Gleason},
  journal={Chemistry of Materials},
Hexafluoropropylene oxide (HFPO) flow rate and filament preconditioning time were found to strongly influence the structure and morphology of fluorocarbon films grown by hot filament chemical vapor deposition (HFCVD). The four films discussed in this work all exhibited the vibrational frequencies of linear CF2 chains, which are also characteristic of bulk poly(tetrafluoroethylene) (PTFE), as shown through Fourier transform infrared spectroscopy (FTIR). The films also incorporated hydroxyl (OH… 

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