Structural Relaxation of Ion-implanted Amorphous Silicon

@inproceedings{Aji2012StructuralRO,
  title={Structural Relaxation of Ion-implanted Amorphous Silicon},
  author={Leonardus Bimo Bayu Aji and S. Ruffell and Bianca Haberl and Sherman Wong and J. E. Bradby and James K. Williams},
  year={2012}
}