Structural , optical and electrical properties of V doped ZnO thin films deposited by r . f . magnetron sputtering

@inproceedings{Lovchinov2010StructuralO,
  title={Structural , optical and electrical properties of V doped ZnO thin films deposited by r . f . magnetron sputtering},
  author={K Lovchinov and H Nichev and Orlin Angelov and Marushka Sendova-Vassileva and Valdek Mikli and Doriana Dimova-Malinovska},
  year={2010}
}
Structural, optical and electrical properties of V doped ZnO thin films deposited by r.f. magnetron co-sputtering on glass substrates at different temperature, Ts, between 150 0 C and 500 0 C are studied. The EDS analyses indicate that the average vanadium content in the films is in the range of 0.86-0.89 at. %. XRD spectra demonstrate preferential (002… CONTINUE READING