Structural, magnetic, and mechanical properties of 5μm thick SmCo films suitable for use in microelectromechanical systems

@article{Walther2008StructuralMA,
  title={Structural, magnetic, and mechanical properties of 5$\mu$m thick SmCo films suitable for use in microelectromechanical systems},
  author={Arnaud Walther and Kirill Khlopkov and Oliver Gutfleisch and Dominique Givord and Nora M. Dempsey},
  journal={Journal of Applied Physics},
  year={2008},
  volume={103},
  pages={043911}
}
5μm thick SmCo films were deposited onto Si substrates using triode sputtering. A study of the influence of deposition temperature (Tdep⩽600°C) on the structural, magnetic, and mechanical properties has shown that optimum properties [highest degree of in-plane texture, maximum in-plane coercivity and remanence (1.3 and 0.8T, respectively), and no film peel-off] are achieved for films deposited at the relatively low temperature of 350°C. This temperature is compatible with film integration into… 
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References

SHOWING 1-10 OF 27 REFERENCES
High performance hard magnetic NdFeB thick films for integration into micro-electro-mechanical systems
5μm thick NdFeB films have been sputtered onto 100mm Si substrates using high rate sputtering (18μm∕h). Films were deposited at ⩽500°C and then annealed at 750°C for 10min. While films deposited at
Microstructure and magnetic properties of SmCo films
Abstract We have studied the role of deposition pressure on the structure and magnetic properties of SmCo films sputtered on Si(1 0 0) substrates. The effect of variation of Sm content on
Microstructures and coercivities of SmCox and Sm(Co,Cu)5 films prepared by magnetron sputtering
Abstract We have investigated the influence of composition and annealing conditions on the magnetic properties and microstructural features of SmCo x films that were prepared by sputtering and
Thin film SmCo magnets for use in electromagnetic microactuators
Efficient magnetic microactuators require a deposition and patterning of a permanent magnetic material. A material that can be deposited in the range of up to a couple of 10μm is sputtered SmCo. For
Evolution of magnetic and microstructural properties of thick sputtered NdFeB films with processing temperature
Abstract Ta (100 nm)/NdFeB (5 μm)/Ta (100 nm) films have been deposited onto Si substrates using triode sputtering (deposition rate ∼18 μm/h). A 2-step procedure was used: deposition at temperatures
rf‐sputtered Sm‐Co films: Phase stability and magnetic properties
We have rf‐sputtered films of the Sm‐Co system for the composition region near the 1–5 and 2–17 compounds. The sputtering target arrangement was such that a range of compositions was deposited along
Preparation and Magnetic Properties of Sm-Co Films with High Substrate Temperatures
Thin magnetic films with an approximate composition of Sm2Co7.8 were prepared on quartz substrates at high temperatures from 150° to 750°C by rf sputtering method. Film structures and magnetic
Sputtered Sm–Co films: Microstructure and magnetic properties
Films of Sm–Co have been sputtered on heated polycrystalline Al2O3 substrates. The effect of variations of the Sm content on microstructure and hard magnetic properties was studied for otherwise
Selectively thermalized sputtering for the deposition of magnetic films with special anisotropies
Special sputtering methods have been developed which allow films of rare‐earth transition‐metal permanent magnet systems that exhibit special magnetic anisotropies to be synthesized. Films have been
SmCo based sputtered films with CaCu5 and TbCu7 structures
SmCo based films containing 20 at. % Fe and with Sm varying from 15.5 to 17 at. % have been synthesized to show the transition from ordered CaCu5 to disordered TbCu7 phase. For either phase, the
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