Structural, magnetic, and mechanical properties of 5μm thick SmCo films suitable for use in microelectromechanical systems

  title={Structural, magnetic, and mechanical properties of 5$\mu$m thick SmCo films suitable for use in microelectromechanical systems},
  author={Arnaud Walther and Kirill Khlopkov and Oliver Gutfleisch and Dominique Givord and Nora M. Dempsey},
  journal={Journal of Applied Physics},
5μm thick SmCo films were deposited onto Si substrates using triode sputtering. A study of the influence of deposition temperature (Tdep⩽600°C) on the structural, magnetic, and mechanical properties has shown that optimum properties [highest degree of in-plane texture, maximum in-plane coercivity and remanence (1.3 and 0.8T, respectively), and no film peel-off] are achieved for films deposited at the relatively low temperature of 350°C. This temperature is compatible with film integration into… 
Correlation between sputtering parameters and composition of SmCo-based films for microelectromechanical system applications
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