Strongly Nonlinear Superconducting Silicon Resonators

  title={Strongly Nonlinear Superconducting Silicon Resonators},
  author={Patrick Bonnet and Francesca Chiodi and Daniel Flanigan and Rapha{\"e}lle Delagrange and Nataniel Brochu and D. D'ebarre and H. le Sueur},
  journal={Physical Review Applied},
Superconducting boron doped silicon is a promising material for integrated silicon quantum devices. In particular, its low electronic density and moderate disorder make it a suitable candidate for the fabrication of large inductances with low losses at microwave frequencies. Here, we study experimentally the electrodynamics of superconducting silicon thin layers patterned in coplanar waveguide resonators, targeting three key properties: kinetic inductance, internal losses, and the variation of… 

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