Stroboscopic Imaging Interferometer for MEMS Performance Measurement

@article{Conway2007StroboscopicII,
  title={Stroboscopic Imaging Interferometer for MEMS Performance Measurement},
  author={J. Conway and J. Osborn and J. Fowler},
  journal={Journal of Microelectromechanical Systems},
  year={2007},
  volume={16},
  pages={668-674}
}
  • J. Conway, J. Osborn, J. Fowler
  • Published 2007
  • Materials Science
  • Journal of Microelectromechanical Systems
  • The insertion of microelectromechanical systems (MEMS) components into aerospace systems requires advanced testing to characterize performance in a space environment. Here, we report a novel stroboscopic interferometer test system that measures nanometer-scale displacements of moving MEMS devices. By combining video imagery and phase-shift interferometry with an environmental chamber, rapid visualization of the dynamic device motion under the actual operational conditions can be achieved. The… CONTINUE READING

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