Stroboscopic Imaging Interferometer for MEMS Performance Measurement

  title={Stroboscopic Imaging Interferometer for MEMS Performance Measurement},
  author={J. Conway and J. Osborn and J. Fowler},
  journal={Journal of Microelectromechanical Systems},
  • J. Conway, J. Osborn, J. Fowler
  • Published 2007
  • Materials Science
  • Journal of Microelectromechanical Systems
  • The insertion of microelectromechanical systems (MEMS) components into aerospace systems requires advanced testing to characterize performance in a space environment. Here, we report a novel stroboscopic interferometer test system that measures nanometer-scale displacements of moving MEMS devices. By combining video imagery and phase-shift interferometry with an environmental chamber, rapid visualization of the dynamic device motion under the actual operational conditions can be achieved. The… CONTINUE READING

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    V Phase-Measurement Interferometry Techniques
    • 1,213
    Quality factors in micron- and submicron-thick cantilevers
    • 574
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    Stroboscopic interferometer system for dynamic MEMS characterization
    • 152
    • Highly Influential
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    Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm.
    • 861
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    Optical measurement methods to study dynamic behavior in MEMS
    • 81
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    A system for the dynamic characterization of microstructures
    • 108