Stress Considerations for System-on-Chip Gas Sensor Integration in CMOS Technology

@article{Filipovic2016StressCF,
  title={Stress Considerations for System-on-Chip Gas Sensor Integration in CMOS Technology},
  author={Lado Filipovic and Siegfried Selberherr},
  journal={IEEE Transactions on Device and Materials Reliability},
  year={2016},
  volume={16},
  pages={483-495}
}
For several decades, researchers have aspired to combine all of the necessary components for a gas sensor with microelectronic circuits in order to create an integrated smart gas sensor device. However, these devices will only be embraced by industry and consumers if their cost of production is reduced to about $1 per device. The drive for affordable… CONTINUE READING