Strain and stress analysis of the oxide film surface in the chemical mechanical polishing process

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@article{Lin2006StrainAS, title={Strain and stress analysis of the oxide film surface in the chemical mechanical polishing process}, author={Yeou-Yih Lin and Ship-Peng Lo and Cheng-Yung Chen}, journal={IJCAT}, year={2006}, volume={26}, pages={233-241} }