Strain Sensing with Piezoelectric Zinc Oxide Thin Films for Vibration Suppression in Hard Disk Drives


This paper describes the integration of thin film ZnO strain sensors onto hard disk drive suspensions for improved vibration suppression for tracking control. Sensor location was designed using an efficient optimization methodology based on linear quadratic gaussian (LQG) control. Sensors were fabricated directly onto steel wafers that were subsequently… (More)


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