Stochastic modeling of coupled electromechanical interaction for uncertainty quantification in electrostatically actuated MEMS

@inproceedings{Agarwal2008StochasticMO,
  title={Stochastic modeling of coupled electromechanical interaction for uncertainty quantification in electrostatically actuated MEMS},
  author={Nitin Agarwal and Narayan R. Aluru},
  year={2008}
}
This work proposes a stochastic framework based on generalized polynomial chaos (GPC), to handle uncertain coupled electromechanical interaction, arising from variations in material properties and geometrical parameters such as gap between the microstructures, applicable to the static analysis of electrostatic MEMS. The proposed framework comprises of two components – a stochastic mechanical analysis, which quantifies the uncertainty associated with the deformation of MEM structures due to the… CONTINUE READING
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References

Publications referenced by this paper.
SHOWING 1-10 OF 33 REFERENCES

A methodology for analyzing the variability in the performance of a MEMS actuator made from a novel ceramic

  • J. S. Kong, D. M. Frangopol, +4 authors R. Raj
  • Sens. Actuators A 116
  • 2004
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